au.\*:("ROCKE, M")
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Titanium nitride for antireflection control and hillock suppression on aluminum silicon metallizationROCKE, M; SCHNEEGANS, M.Journal of vacuum science and technology. B. Microelectronics processing and phenomena. 1988, Vol 6, Num 4, pp 1113-1115, issn 0734-211XArticle
